SMI (Silicon Microstructures, Inc.) is proud to announce that their flagship low-pressure SM95 sensor die is now available as an uncompensated, unamplified device in an SO16 package. This SMT package allows high-volume assembly of SMI’s proven SM95 sensors for those customers who do not require the fully compensated, digital solutions SMI currently offers. The new devices have an operating temperature range from -40°C to +85°C, and reliability has been established not only by extensive testing guided by the AEC-Q100 Reliability Standard, but also by the experience of millions of devices already in the field.
A variety of packages are available, including dual vertical ports for the smallest footprint, dual horizontal ports for the lowest profile and a single vertical port for gauge applications. The dual-port versions allow pressure to be applied from the backside of the die to protect electrical components from harsh environments. Three pressure ranges are available, ranging from 10 cm H2O (0.15 psi) to 100 cm H2O (1,5 psi). All devices have unamplified, uncompensated millivolt outputs. Devices are typically powered at 3.3 or 5 volts.
Unique FEA-assisted electro-mechanical design along with advanced MEMS processing in SMI’s captive fabrication facility contribute to simplifying integration of these devices into myriad medical and industrial applications. “SMI has built a reputation of being a world market leader in low pressure sensing delivering high stability and accuracy for industrial and medical applications,” says Omar Abed, President and CEO if Silicon Microstructures. “The SM9D and SM9G product lines bring this high level of performance to customers who are seeking an uncompensated, low pressure solution to enable high resolution, high accuracy, or custom calibration for specific applications.”
SMI is a member of the worldwide Elmos Semiconductor Group, offering proven solutions to a range of industries, based on application-specific ICs, sensors and complete microsystems. SMI is an ISO/TS16949:2009 certified premier developer and manufacturer of MEMS-based pressure sensors for a broad range of markets, with over 25 years of experience. SMI’s design, production and quality control processes have enabled it to develop both the most sensitive and smallest MEMS pressure sensors available on the market today.